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Advanced techniques for glancing angle deposition

Advanced techniques for glancing angle deposition http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures CrossRef

Advanced techniques for glancing angle deposition

Robbie, K.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures , Volume 16 (3): 1115 – May 1, 1998
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Advanced techniques for glancing angle deposition

Robbie, K.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures , Volume 16 (3): 1115 – May 1, 1998

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Publisher
CrossRef
ISSN
0734-211X
DOI
10.1116/1.590019
Publisher site
See Article on Publisher Site

Abstract

Journal

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures – CrossRef

Published: May 1, 1998

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