Get 20M+ Full-Text Papers For Less Than $1.50/day. Start a 7-Day Trial for You or Your Team.

Learn More →

Basic Aspects and Challenges of Semiconductor Gas Sensors

Basic Aspects and Challenges of Semiconductor Gas Sensors tance. This resistance change is used as the measurement parameter of a semi· conductor gas sensor, with sensitivity A defined as the ratio of the resistance in Basic Aspects and air to that in a sample gas containing an inflammable component. The reactivity of the oxygen adsorbates is, of course, a function of both the kind of inflammable Challenges of gas and the sensor temperature. There­ fore, the temperature T M at which the maximum sensitivity kM is observed is dependent upon the particular inflam­ Semiconductor mable gas used. Since semiconductor gas sensors respond more or less to any in­ flammable gas due to this mechanism, the sensors usually suffer from cross­ Gas Sensors sensitivity, that is, lack of selectivity to a specific gas. Yasuhiro Shimizu and Makoto Egashira Occasionally, inflammable gases inter­ act directly with sensor materials; for ex­ ample, hydrogen chemisorbs negatively on Sn0 under certain conditions. • Such phenomena are usually observed at low Introduction temperatures, at which the reaction with In 1962, it was understood that the charged oxygen adsorbates play an im­ oxygen adsorbates is limited. In addition electrical properties of some semicon­ portant role in detecting inflammable to the reaction with oxygen adsorbates, http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png MRS Bulletin Springer Journals

Basic Aspects and Challenges of Semiconductor Gas Sensors

Shimizu, Yasuhiro; Egashira, Makoto
MRS Bulletin , Volume 24 (6) – Jun 1, 1999
Download PDF
7 pages

Loading next page...
 
/lp/springer-journals/basic-aspects-and-challenges-of-semiconductor-gas-sensors-pwZipWcYEP

References (9)

Publisher
Springer Journals
Copyright
Copyright © The Materials Research Society 1999
ISSN
0883-7694
eISSN
1938-1425
DOI
10.1557/s0883769400052465
Publisher site
See Article on Publisher Site

Abstract

tance. This resistance change is used as the measurement parameter of a semi· conductor gas sensor, with sensitivity A defined as the ratio of the resistance in Basic Aspects and air to that in a sample gas containing an inflammable component. The reactivity of the oxygen adsorbates is, of course, a function of both the kind of inflammable Challenges of gas and the sensor temperature. There­ fore, the temperature T M at which the maximum sensitivity kM is observed is dependent upon the particular inflam­ Semiconductor mable gas used. Since semiconductor gas sensors respond more or less to any in­ flammable gas due to this mechanism, the sensors usually suffer from cross­ Gas Sensors sensitivity, that is, lack of selectivity to a specific gas. Yasuhiro Shimizu and Makoto Egashira Occasionally, inflammable gases inter­ act directly with sensor materials; for ex­ ample, hydrogen chemisorbs negatively on Sn0 under certain conditions. • Such phenomena are usually observed at low Introduction temperatures, at which the reaction with In 1962, it was understood that the charged oxygen adsorbates play an im­ oxygen adsorbates is limited. In addition electrical properties of some semicon­ portant role in detecting inflammable to the reaction with oxygen adsorbates,

Journal

MRS Bulletin – Springer Journals

Published: Jun 1, 1999

There are no references for this article.