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Polysilazane Precursor Used for Formation of Oxidized Insulator

Polysilazane Precursor Used for Formation of Oxidized Insulator http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png MRS Proceedings Unpaywall

Polysilazane Precursor Used for Formation of Oxidized Insulator

Urabe, Yuji; Sameshima, Toshiyuki
MRS Proceedings – Jan 1, 2008
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Publisher
Unpaywall
ISSN
0272-9172
DOI
10.1557/proc-1066-a05-02
Publisher site
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Abstract

Journal

MRS Proceedings – Unpaywall

Published: Jan 1, 2008

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