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Analysis of piezoresistance in p-type silicon for mechanical sensors

Analysis of piezoresistance in p-type silicon for mechanical sensors http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Journal of Microelectromechanical Systems CrossRef

Analysis of piezoresistance in p-type silicon for mechanical sensors

Toriyama, T.; Sugiyama, S.
Journal of Microelectromechanical Systems , Volume 11 (5): 598-604 – Oct 1, 2002
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Analysis of piezoresistance in p-type silicon for mechanical sensors

Toriyama, T.; Sugiyama, S.
Journal of Microelectromechanical Systems , Volume 11 (5): 598-604 – Oct 1, 2002

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Publisher
CrossRef
ISSN
1057-7157
DOI
10.1109/jmems.2002.802904
Publisher site
See Article on Publisher Site

Abstract

Journal

Journal of Microelectromechanical Systems – CrossRef

Published: Oct 1, 2002

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