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Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers

Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Applied Physics Letters CrossRef

Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers

Carcia, P. F.; McLean, R. S.; Reilly, M. H.; Groner, M. D.; George, S. M.
Applied Physics Letters , Volume 89 (3): 031915 – Jul 17, 2006
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Publisher
CrossRef
ISSN
0003-6951
DOI
10.1063/1.2221912
Publisher site
See Article on Publisher Site

Abstract

Journal

Applied Physics Letters – CrossRef

Published: Jul 17, 2006

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