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Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs

Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel... http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png IEEE Transactions on Semiconductor Manufacturing CrossRef

Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs

Akbar, Chandni; Li, Yiming; Sung, Wen-Li
IEEE Transactions on Semiconductor Manufacturing : 1-1 – Jan 1, 2021
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Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs

Akbar, Chandni; Li, Yiming; Sung, Wen-Li
IEEE Transactions on Semiconductor Manufacturing : 1-1 – Jan 1, 2021

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Publisher
CrossRef
ISSN
0894-6507
DOI
10.1109/tsm.2021.3116250
Publisher site
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Abstract

Journal

IEEE Transactions on Semiconductor Manufacturing – CrossRef

Published: Jan 1, 2021

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