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Highly oriented crystalline films of copper sulfide and copper selenide have been grown on glass by low-pressure metal-organic chemical vapor deposition (LP-MOCVD) and by aerosol-assisted chemical vapor deposition (AACVD), using the novel air-stable compounds Cu(E2CNMenHex)2]* (where E=S,Se). Thin films of non-stoichiometric cubic CuS and CuSe have been deposited in the temperature range 450–500 °C.
Journal of Materials Science: Materials in Electronics – Springer Journals
Published: Oct 12, 2004
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