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Spin Coating with High Viscosity Photoresist on Square Substrates — Applications in the Thin Film Hybrid Microwave Integrated Circuit Field

Spin Coating with High Viscosity Photoresist on Square Substrates — Applications in the Thin Film... The importance of miniaturisation of hybrid microwave integrated circuits (HMICs) and the increasingly stringent demands on the line‐width control of conductor lines in satellite communications and digital radio systems are well established. The importance of photolithographic processes for achieving accuracy and control of the line width necessary to guarantee performance and repeatability of HMICs is acknowledged. The purpose of this paper is to discuss problems concerning the photoresist deposition process and how spin coating is necessary for obtaining the quality, precision and repeatability required for fine line HMICs for high frequency applications. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Hybrid Circuits Emerald Publishing

Spin Coating with High Viscosity Photoresist on Square Substrates — Applications in the Thin Film Hybrid Microwave Integrated Circuit Field

Carcano, G.; Ceriani, M.; Soglio, F.
Hybrid Circuits , Volume 10 (3): 9 – Mar 1, 1993
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References (5)

Publisher
Emerald Publishing
Copyright
© MCB UP Limited
ISSN
0265-3028
eISSN
2977-7062
DOI
10.1108/eb044507
Publisher site
See Article on Publisher Site

Abstract

The importance of miniaturisation of hybrid microwave integrated circuits (HMICs) and the increasingly stringent demands on the line‐width control of conductor lines in satellite communications and digital radio systems are well established. The importance of photolithographic processes for achieving accuracy and control of the line width necessary to guarantee performance and repeatability of HMICs is acknowledged. The purpose of this paper is to discuss problems concerning the photoresist deposition process and how spin coating is necessary for obtaining the quality, precision and repeatability required for fine line HMICs for high frequency applications.

Journal

Hybrid Circuits – Emerald Publishing

Published: Mar 1, 1993

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