Microstructure Characterization of Multilayer Thin Coatings ZrN/Si3N4 by X‐Ray Diffraction Using Noncoplanar Measurement Geometry

Microstructure Characterization of Multilayer Thin Coatings ZrN/Si3N4 by X‐Ray Diffraction... IntroductionThin films, based on transition metal nitrides, have been intensively used as protective coatings due to their high hardness, wear and corrosion resistance, chemical and thermal stability, low friction coefficient. The functional properties of such coatings are also useful for their applications in microelectronics and optics. Initially, the simple coatings composed of a nitride of a transition metal (most often Ti, Cr, Zr) were used. However, in order to enhance the properties of nitride‐based coatings, a more complicated systems were developed: multi‐component films (TiAlN, TiZrN, TiNbN, TiCN, TiMoN), nanocomposites, and multilayer nanostructures. Within the multilayer structures, the different combinations of alternate layers are investigated, including the nitrides of different transition metals like ZrN/TiN, transition metals and their nitrides (for example, Cr/CrN), coatings comprising crystalline and amorphous phases.Another significant potential application of nitride‐based coatings is the development of radiation tolerant coating materials for nuclear applications. This application is of equal importance along with the development of the structural materials, for example oxide dispersion strengthened (ODS) steels. Radiation environment of nuclear reactors induces different kinds of damages in the materials (point defects, bubble formation, swelling, corrosion, etc.), which results in the degradation of the materials and, therefore, the enhancement technologies for http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Physica Status Solidi (A) Applications and Materials Science Wiley

Microstructure Characterization of Multilayer Thin Coatings ZrN/Si3N4 by X‐Ray Diffraction Using Noncoplanar Measurement Geometry

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Publisher
Wiley Subscription Services, Inc., A Wiley Company
Copyright
© 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
ISSN
1862-6300
eISSN
1862-6319
D.O.I.
10.1002/pssa.201700670
Publisher site
See Article on Publisher Site

Abstract

IntroductionThin films, based on transition metal nitrides, have been intensively used as protective coatings due to their high hardness, wear and corrosion resistance, chemical and thermal stability, low friction coefficient. The functional properties of such coatings are also useful for their applications in microelectronics and optics. Initially, the simple coatings composed of a nitride of a transition metal (most often Ti, Cr, Zr) were used. However, in order to enhance the properties of nitride‐based coatings, a more complicated systems were developed: multi‐component films (TiAlN, TiZrN, TiNbN, TiCN, TiMoN), nanocomposites, and multilayer nanostructures. Within the multilayer structures, the different combinations of alternate layers are investigated, including the nitrides of different transition metals like ZrN/TiN, transition metals and their nitrides (for example, Cr/CrN), coatings comprising crystalline and amorphous phases.Another significant potential application of nitride‐based coatings is the development of radiation tolerant coating materials for nuclear applications. This application is of equal importance along with the development of the structural materials, for example oxide dispersion strengthened (ODS) steels. Radiation environment of nuclear reactors induces different kinds of damages in the materials (point defects, bubble formation, swelling, corrosion, etc.), which results in the degradation of the materials and, therefore, the enhancement technologies for

Journal

Physica Status Solidi (A) Applications and Materials ScienceWiley

Published: Jan 1, 2018

Keywords: ; ; ; ;

References

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