Electron energy probability function modulation with external electron beam in capacitive coupled radio frequency discharges

Electron energy probability function modulation with external electron beam in capacitive coupled... INTRODUCTIONLow temperature plasmas (LTPs) have attracted great interest in many years, as they have been widely used as tools for etching, surface modification, plasma treatment of materials and film deposition in semiconductor industry. Recently, with the great degree of miniaturization of today's semiconductor device on the nanometer scale, controlling of plasma processing parameters has attract increasing attention. Thus, overcoming the problems of damage and poor selectivity for etching, ascribed to high‐energy ion and electron bombardment to the substrate surface, has been increasingly important. This problem can be solved by using an electron beam(EB) driven LTP, as EB generated plasmas are characterized by low electron temperature (1 eV) and high plasma density (1016 m−3), as they can indeed provide a large flux of electron and ion with low energy compared to most molecular bond strength (5 eV). Ions are cold in LTPs, so reducing the electron temperature means reducing the ion and electron kinetic energy. The underlying physics is that high energy EB dominates the excitation and ionization processes, and both the beam electron and the daughter electron born from the ionization collision are cooled quickly to low temperature, since most of them participate the excitation and ionization collisions through colliding with the http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Plasma Processes and Polymers Wiley

Electron energy probability function modulation with external electron beam in capacitive coupled radio frequency discharges

Loading next page...
 
/lp/wiley/electron-energy-probability-function-modulation-with-external-electron-DJRfgTIyqj
Publisher
Wiley Subscription Services, Inc., A Wiley Company
Copyright
© 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
ISSN
1612-8850
eISSN
1612-8869
D.O.I.
10.1002/ppap.201700169
Publisher site
See Article on Publisher Site

Abstract

INTRODUCTIONLow temperature plasmas (LTPs) have attracted great interest in many years, as they have been widely used as tools for etching, surface modification, plasma treatment of materials and film deposition in semiconductor industry. Recently, with the great degree of miniaturization of today's semiconductor device on the nanometer scale, controlling of plasma processing parameters has attract increasing attention. Thus, overcoming the problems of damage and poor selectivity for etching, ascribed to high‐energy ion and electron bombardment to the substrate surface, has been increasingly important. This problem can be solved by using an electron beam(EB) driven LTP, as EB generated plasmas are characterized by low electron temperature (1 eV) and high plasma density (1016 m−3), as they can indeed provide a large flux of electron and ion with low energy compared to most molecular bond strength (5 eV). Ions are cold in LTPs, so reducing the electron temperature means reducing the ion and electron kinetic energy. The underlying physics is that high energy EB dominates the excitation and ionization processes, and both the beam electron and the daughter electron born from the ionization collision are cooled quickly to low temperature, since most of them participate the excitation and ionization collisions through colliding with the

Journal

Plasma Processes and PolymersWiley

Published: Jan 1, 2018

Keywords: ;

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

Monthly Plan

  • Read unlimited articles
  • Personalized recommendations
  • No expiration
  • Print 20 pages per month
  • 20% off on PDF purchases
  • Organize your research
  • Get updates on your journals and topic searches

$49/month

Start Free Trial

14-day Free Trial

Best Deal — 39% off

Annual Plan

  • All the features of the Professional Plan, but for 39% off!
  • Billed annually
  • No expiration
  • For the normal price of 10 articles elsewhere, you get one full year of unlimited access to articles.

$588

$360/year

billed annually
Start Free Trial

14-day Free Trial