An Evaporative Initiated Chemical Vapor Deposition Coater for Nanoglue Bonding

An Evaporative Initiated Chemical Vapor Deposition Coater for Nanoglue Bonding IntroductionInitiated chemical vapor deposition (iCVD) of polymer coatings is a recent development that enables engineering of surfaces with thin polymer coatings through custom functionalities that are chemically included in monomers. The iCVD coating process allows for a low‐temperature surface polymerization separated from the high‐temperature (e.g., ≈200 °C) initiation reaction. This can yield a coating that is conformal, without solvent complications, chemically pure (minimal side reactions), and can be performed on almost any material including those that are heat‐sensitive. Several applications (e.g., refs.) have already incorporated iCVD engineered surfaces, such as for sensors, membranes, protective layers, microfluidic coatings, and, of interest here, nanoscale adhesives.The monomer glycidyl methacrylate (GMA) has an epoxy functionality. Consequently, iCVD coatings of poly(glycidyl methacrylate) (pGMA) have previously been used to bond microfluidic channels or wafers together. It would be desirable to use this vapor‐based coating method in other bonding applications, specifically using materials that are not ideal, that is, with non‐planar features. Our motivation stems from laser‐induced compression science and inertial fusion, which employ lasers to impact microstructured “targets” that are often glued multilayers of different materials. In order to model and interpret the experiments at the high‐strain rates and pressures resulting from laser impact, these glue http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Advanced Engineering Materials Wiley

An Evaporative Initiated Chemical Vapor Deposition Coater for Nanoglue Bonding

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Publisher
Wiley Subscription Services, Inc., A Wiley Company
Copyright
© 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
ISSN
1438-1656
eISSN
1527-2648
D.O.I.
10.1002/adem.201700839
Publisher site
See Article on Publisher Site

Abstract

IntroductionInitiated chemical vapor deposition (iCVD) of polymer coatings is a recent development that enables engineering of surfaces with thin polymer coatings through custom functionalities that are chemically included in monomers. The iCVD coating process allows for a low‐temperature surface polymerization separated from the high‐temperature (e.g., ≈200 °C) initiation reaction. This can yield a coating that is conformal, without solvent complications, chemically pure (minimal side reactions), and can be performed on almost any material including those that are heat‐sensitive. Several applications (e.g., refs.) have already incorporated iCVD engineered surfaces, such as for sensors, membranes, protective layers, microfluidic coatings, and, of interest here, nanoscale adhesives.The monomer glycidyl methacrylate (GMA) has an epoxy functionality. Consequently, iCVD coatings of poly(glycidyl methacrylate) (pGMA) have previously been used to bond microfluidic channels or wafers together. It would be desirable to use this vapor‐based coating method in other bonding applications, specifically using materials that are not ideal, that is, with non‐planar features. Our motivation stems from laser‐induced compression science and inertial fusion, which employ lasers to impact microstructured “targets” that are often glued multilayers of different materials. In order to model and interpret the experiments at the high‐strain rates and pressures resulting from laser impact, these glue

Journal

Advanced Engineering MaterialsWiley

Published: Jan 1, 2018

References

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