Zinc tin oxide thin films prepared by MOCVD with different Sn/Zn ratios

Zinc tin oxide thin films prepared by MOCVD with different Sn/Zn ratios Zinc tin oxide (ZTO) thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic chemical vapor deposition (MOCVD). The crystallization, microstructure and optical properties were investigated by scanning electronic microscope (SEM), X-ray diffraction (XRD) and ultraviolet–visible (UV–Vis) spectrophotometer. The results show that with the increase in Sn/Zn ratio, the crystal changes from wurtzite to rutile phase. When the ratio reaches 11:18, the intensity of Zn2SnO4 peaks appears to be the strongest and the optical band gap is about 3.27 eV. Calculated by the envelope method, the thickness of the ZTO thin films is 713.24 nm. Measured by UV–Vis spectrophotometer, the transmittance of the ZTO thin films reaches up to 80 % in the wavelength range of 400–1000 nm when the Sn/Zn ratio is 7:18. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Rare Metals Springer Journals

Zinc tin oxide thin films prepared by MOCVD with different Sn/Zn ratios

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Publisher
Nonferrous Metals Society of China
Copyright
Copyright © 2015 by The Nonferrous Metals Society of China and Springer-Verlag Berlin Heidelberg
Subject
Materials Science; Metallic Materials; Nanotechnology; Ceramics, Glass, Composites, Natural Materials; Surfaces and Interfaces, Thin Films; Inorganic Chemistry; Physical Chemistry
ISSN
1001-0521
eISSN
1867-7185
D.O.I.
10.1007/s12598-015-0583-5
Publisher site
See Article on Publisher Site

Abstract

Zinc tin oxide (ZTO) thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic chemical vapor deposition (MOCVD). The crystallization, microstructure and optical properties were investigated by scanning electronic microscope (SEM), X-ray diffraction (XRD) and ultraviolet–visible (UV–Vis) spectrophotometer. The results show that with the increase in Sn/Zn ratio, the crystal changes from wurtzite to rutile phase. When the ratio reaches 11:18, the intensity of Zn2SnO4 peaks appears to be the strongest and the optical band gap is about 3.27 eV. Calculated by the envelope method, the thickness of the ZTO thin films is 713.24 nm. Measured by UV–Vis spectrophotometer, the transmittance of the ZTO thin films reaches up to 80 % in the wavelength range of 400–1000 nm when the Sn/Zn ratio is 7:18.

Journal

Rare MetalsSpringer Journals

Published: Sep 4, 2015

References

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