X-ray and UV Adjustment of Threshold Voltage in MOS-Circuit Manufacture

X-ray and UV Adjustment of Threshold Voltage in MOS-Circuit Manufacture Techniques are presented for the radiation fine adjustment of threshold voltage in MOS circuits, employing x-rays (photon energies 10–20 keV) and near-UV radiation. The adjustment consists in the controlled generation of heat-resistant charge in gate oxide under irradiation, due to the presence of phosphorus in the oxide. The experience gained by using the techniques in the mass production of a wide variety of MOS circuits is briefly reviewed. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

X-ray and UV Adjustment of Threshold Voltage in MOS-Circuit Manufacture

Loading next page...
 
/lp/springer_journal/x-ray-and-uv-adjustment-of-threshold-voltage-in-mos-circuit-D1Jex430wS
Publisher
Springer Journals
Copyright
Copyright © 2002 by MAIK "Nauka/Interperiodica"
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1023/A:1020925707726
Publisher site
See Article on Publisher Site

Abstract

Techniques are presented for the radiation fine adjustment of threshold voltage in MOS circuits, employing x-rays (photon energies 10–20 keV) and near-UV radiation. The adjustment consists in the controlled generation of heat-resistant charge in gate oxide under irradiation, due to the presence of phosphorus in the oxide. The experience gained by using the techniques in the mass production of a wide variety of MOS circuits is briefly reviewed.

Journal

Russian MicroelectronicsSpringer Journals

Published: Oct 13, 2004

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Search

Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly

Organize

Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.

Access

Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve

Freelancer

DeepDyve

Pro

Price

FREE

$49/month
$360/year

Save searches from
Google Scholar,
PubMed

Create lists to
organize your research

Export lists, citations

Read DeepDyve articles

Abstract access only

Unlimited access to over
18 million full-text articles

Print

20 pages / month

PDF Discount

20% off