ISSN 10637397, Russian Microelectronics, 2013, Vol. 42, No. 7, pp. 363–367. © Pleiades Publishing, Ltd., 2013.
Original Russian Text © V.V. Amelichev, A.N. Saurov, V.V. Aravin, A.A. Reznev, A.A. Demin, M.V. Khokhlov, 2012, published in Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika, 2012, No. 6, pp. 57–64.
The traditional technologies for manufacturing
integral circuits gave the grounds for fabricating
microelectromechanical systems (MEMSs), operat
ing as sensors and converters of physical parameters,
linear and radial drives, address drug microdose deliv
erers for biomedical investigations, devices for infor
mation imaging and wireless communication, etc.
Such lowintegration MEMSs as microaccelerome
ters, bubblejet heads, and projection micromirrors
have been replaced by more complex microsystems
(optical, analytical, wireless, etc.) with a very high
market potential . The market of mobile devices is
being rapidly developed and wireless communication
is required for them.
Wireless communication is used, as a rule, to solve
one of two fundamentally different problems. The first
problem is data transmission over large distances
where the use of a cable is not possible or unprofitable
for some reasons. The second problem is data trans
mission over short distances when the wire connection
is inconvenient, not uniform, or requires an additional
element (at least, s wire with specified characteristics).
Note that longrange communication has been used
for a long time, while shortrange wireless communi
cation has become important in recent years .
Sometimes, the coverage area of wireless transmit
ters should be not just small but limited from above.
For example, onetype devices located at a short dis
tance from one another should not interfere. This dis
tance limitation is an additional security blanket, since
no one can intercept the data transmitted during the
communication of devices with one another. In addi
tion, the small operation range standards are conve
nient because here the supervisory service policy con
cerning frequency sharing is not so strict. If there is no
noise for other devices and the requirement for noise
protection of other radioelectronic devices is met,
such standards need to receive permission once from
the state commission on radio frequencies and then
used without supplementary permissions. In particu
lar, the ZigBee and Bluetooth technologies were
approved under these conditions .
The shortrange magnetic wireless communica
tion, operation is very attractive for applications of
personal, portable, and mobile devices for music and
speech transmission. In the devices where the size,
power, and reliability are the crucial parameters and
the range is limited by the user’s personal place, short
range magnetic wireless communication has advan
tages and can be used, e.g., in neonatal and infirm
telemetry and in the cases when the other types of
wireless communication are forbidden by the Russian
Health Ministry. Commercial head phones for MP3
and DVD players, mobile phone headsets, etc., are
entirely harmless. In addition, this communication is
used in deleterious and other liquid media where radio
communication is impossible .
Generally, regardless of the type of transmitted sig
nals (radio or magnetic), the wireless MEMSs can be
divided into two groups: information and measuring.
Wireless Magnetoresistive Microsystem
for Magnetic Field Measurements
V. V. Amelichev
, A. N.
, V. V. Aravin
, A. A. Reznev
, A. A. Demin
, and M. V. Khokhlov
Research and Production Complex Technological Center, Moscow, Russia
Federal State Institution “V/h 35533,” Russia
Federal State Institution “V/h 68240,” Russia
Scientific and Research Institute of Technology and Manufacturing Automatics, Moscow, Russia
Received April 24, 2012
—The design and technology of magnetic semiconductor elements of wireless magnetoresistive
microsystems for magnetic field measurements are proposed and the results of the investigations of a highly
sensitivity magnetoresistive converter with magnetic field concentrators are presented. The characteristics of
the developed measuring amplifier for operation with a signal from a lowresistance magnetoresistive bridge
with a certain unbalance value are reported. The technology for fabricating magnetic semiconductor ICs
based on thinfilm magnetoresistive structures is described.
: wireless microsystem, magnetic field, magnetoresistive transducer, magnetic semiconductor ele