A novel physical model is presented for mechanical finishing of diamond crystals by the excitation of coherent traveling elastic waves, using special algorithms to control the motion of an abrasive tool over a work surface. The practicability of the method is shown in the context of isotropic-continuum dynamics. A mechanism of finishing is discussed, whereby the material is removed as nanoclusters in the quantal mode of wave absorption, taking into account entropy production. A relation is derived between entropy production and the mean roughness of the work surface.
Russian Microelectronics – Springer Journals
Published: Nov 9, 2011
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