The provided examples demonstrate the application of a simulator-based virtual scanning electron microscope (SEM) in certification of test object sizes on a low-voltage SEM and in calibration of a high-voltage SEM operating in the slow secondary electron detection mode. Using the virtual SEM, the problem of comparing different SEM calibration techniques is solved.
Russian Microelectronics – Springer Journals
Published: Jul 6, 2015
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.
All for just $49/month
Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly
Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.
All the latest content is available, no embargo periods.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud