Verification of the algorithm for emission tomography of plasma inhomogeneities in a plasma-chemical reactor using the Langmuir multiprobe

Verification of the algorithm for emission tomography of plasma inhomogeneities in a... The few-view emission tomography (ET) of plasma, which introduces physical properties of objects into a reconstruction algorithm, requires a reliable experimental verification using independent methods for validating an adopted model of plasma inhomogeneities. The chosen test object—low-temperature argon plasma in a reactor with a remote plasma source—allows one to study the two-dimensional spatial distribution of a concentration of Ar+ ions, which is calculated using the two-view ET, and to verify results using direct measurements by a Langmuir multiprobe located in the plane of tomographic scanning. Studies are carried out for the chamber pressure 2–12 mTorr; the sensitivity of the ion-field homogeneity to the external magnetic field is estimated. A close agreement between concentration fields of Ar+, which are measured and reconstructed by tomography, is obtained. The divergence between the probe method and the ET data reconstruction with respect to two views is not above 10%. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Verification of the algorithm for emission tomography of plasma inhomogeneities in a plasma-chemical reactor using the Langmuir multiprobe

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Publisher
Pleiades Publishing
Copyright
Copyright © 2014 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739714040039
Publisher site
See Article on Publisher Site

Abstract

The few-view emission tomography (ET) of plasma, which introduces physical properties of objects into a reconstruction algorithm, requires a reliable experimental verification using independent methods for validating an adopted model of plasma inhomogeneities. The chosen test object—low-temperature argon plasma in a reactor with a remote plasma source—allows one to study the two-dimensional spatial distribution of a concentration of Ar+ ions, which is calculated using the two-view ET, and to verify results using direct measurements by a Langmuir multiprobe located in the plane of tomographic scanning. Studies are carried out for the chamber pressure 2–12 mTorr; the sensitivity of the ion-field homogeneity to the external magnetic field is estimated. A close agreement between concentration fields of Ar+, which are measured and reconstructed by tomography, is obtained. The divergence between the probe method and the ET data reconstruction with respect to two views is not above 10%.

Journal

Russian MicroelectronicsSpringer Journals

Published: Jul 15, 2014

References

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