Using a chromatic-aberration correction system to achieve sub-1.6-nm resolutions of a focused-ion-beam microscope designed for characterization and processing

Using a chromatic-aberration correction system to achieve sub-1.6-nm resolutions of a... The resolution of focused-ion-beam (FIB) microscopes, whether analytical or processing ones, is known to be determined by three main factors: (i) the size of a Gaussian (ideal) image of the ion source, (ii) the ion-optical aberrations, and (iii) the scattering of primary ions and secondary particles (both ions and electrons) in the target. This paper shows that each of them can be significantly reduced owing to recent advances in the field. These are (i) innovative field-ionization ion sources with a sub-1-nm effective emission area and improved brightness and ion-energy spread, (ii) the concept of a combined electromagnetic mirror for correcting axial aberrations in ion optics, and (iii) fresh data on the collision of low-energy He+ ions with a pure-metal surface and on the deceleration of low-energy O 2 + ions in diamond. On this basis, a new concept of FIB microscope is proposed and discussed that is capable of operating in both analytical and processing mode, and offers better resolution by reducing all of the above-mentioned factors. It is shown that the combined electromagnetic mirror proposed enables one to achieve a 1.6-and a 1.5-nm resolution in analytical and processing mode, respectively, when only chromatic aberration is corrected. With perfect axial-aberration correction, a 0.6-and a 1-nm resolution should be attainable in analytical and processing mode, respectively. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Using a chromatic-aberration correction system to achieve sub-1.6-nm resolutions of a focused-ion-beam microscope designed for characterization and processing

Loading next page...
 
/lp/springer_journal/using-a-chromatic-aberration-correction-system-to-achieve-sub-1-6-nm-hUxP9NVSu1
Publisher
Springer Journals
Copyright
Copyright © 2007 by Pleiades Publishing, Ltd.
Subject
Engineering; Electronic and Computer Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739707050010
Publisher site
See Article on Publisher Site

Abstract

The resolution of focused-ion-beam (FIB) microscopes, whether analytical or processing ones, is known to be determined by three main factors: (i) the size of a Gaussian (ideal) image of the ion source, (ii) the ion-optical aberrations, and (iii) the scattering of primary ions and secondary particles (both ions and electrons) in the target. This paper shows that each of them can be significantly reduced owing to recent advances in the field. These are (i) innovative field-ionization ion sources with a sub-1-nm effective emission area and improved brightness and ion-energy spread, (ii) the concept of a combined electromagnetic mirror for correcting axial aberrations in ion optics, and (iii) fresh data on the collision of low-energy He+ ions with a pure-metal surface and on the deceleration of low-energy O 2 + ions in diamond. On this basis, a new concept of FIB microscope is proposed and discussed that is capable of operating in both analytical and processing mode, and offers better resolution by reducing all of the above-mentioned factors. It is shown that the combined electromagnetic mirror proposed enables one to achieve a 1.6-and a 1.5-nm resolution in analytical and processing mode, respectively, when only chromatic aberration is corrected. With perfect axial-aberration correction, a 0.6-and a 1-nm resolution should be attainable in analytical and processing mode, respectively.

Journal

Russian MicroelectronicsSpringer Journals

Published: Sep 27, 2007

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Search

Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly

Organize

Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.

Access

Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve

Freelancer

DeepDyve

Pro

Price

FREE

$49/month
$360/year

Save searches from
Google Scholar,
PubMed

Create lists to
organize your research

Export lists, citations

Read DeepDyve articles

Abstract access only

Unlimited access to over
18 million full-text articles

Print

20 pages / month

PDF Discount

20% off