Emission tomography is a promising method for the diagnostics of thelateral uniformity of plasma components. However, the technological features of microelectronics allow one to use a strictly limited number of views, which adversely affects the quality of the reconstruction. The earlier proposed model of local inhomogeneities (MLI) allows one to resolve the diagnostic difficulties of the lateral homogeneity of the components of low-temperature plasma in the case of the two-view fan-like scanning scheme. In this work, the model is supplemented taking into account an additional factor affecting the accuracy of the tomographic reconstruction, namely, the dependence of the radiation intensity recorded by the optical angular sensor upon the distance to the radiating plasma particle. This was taken into account for the tomographic reconstruction using the method of the maximum entropy, which is basic for MLI.
Russian Microelectronics – Springer Journals
Published: Mar 11, 2017
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.
All for just $49/month
Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly
Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.
Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.
Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.
All the latest content is available, no embargo periods.
“Hi guys, I cannot tell you how much I love this resource. Incredible. I really believe you've hit the nail on the head with this site in regards to solving the research-purchase issue.”Daniel C.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud
“I must say, @deepdyve is a fabulous solution to the independent researcher's problem of #access to #information.”@deepthiw
“My last article couldn't be possible without the platform @deepdyve that makes journal papers cheaper.”@JoseServera