Two-view tomography of low-temperature plasma

Two-view tomography of low-temperature plasma Emission tomography is a promising method for the diagnostics of thelateral uniformity of plasma components. However, the technological features of microelectronics allow one to use a strictly limited number of views, which adversely affects the quality of the reconstruction. The earlier proposed model of local inhomogeneities (MLI) allows one to resolve the diagnostic difficulties of the lateral homogeneity of the components of low-temperature plasma in the case of the two-view fan-like scanning scheme. In this work, the model is supplemented taking into account an additional factor affecting the accuracy of the tomographic reconstruction, namely, the dependence of the radiation intensity recorded by the optical angular sensor upon the distance to the radiating plasma particle. This was taken into account for the tomographic reconstruction using the method of the maximum entropy, which is basic for MLI. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Two-view tomography of low-temperature plasma

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Publisher
Pleiades Publishing
Copyright
Copyright © 2017 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739717010036
Publisher site
See Article on Publisher Site

Abstract

Emission tomography is a promising method for the diagnostics of thelateral uniformity of plasma components. However, the technological features of microelectronics allow one to use a strictly limited number of views, which adversely affects the quality of the reconstruction. The earlier proposed model of local inhomogeneities (MLI) allows one to resolve the diagnostic difficulties of the lateral homogeneity of the components of low-temperature plasma in the case of the two-view fan-like scanning scheme. In this work, the model is supplemented taking into account an additional factor affecting the accuracy of the tomographic reconstruction, namely, the dependence of the radiation intensity recorded by the optical angular sensor upon the distance to the radiating plasma particle. This was taken into account for the tomographic reconstruction using the method of the maximum entropy, which is basic for MLI.

Journal

Russian MicroelectronicsSpringer Journals

Published: Mar 11, 2017

References

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