Transformations of porous layers upon high-temperature annealing: Simulation

Transformations of porous layers upon high-temperature annealing: Simulation In this work, the lattice kinetic Monte Carlo model has been used to investigate morphological transformations in porous films of different density in the process of high-temperature annealing. The characteristics of porous films of different initial densities have been compared at different time moments of the sintering process. Layers with a porosity from 20% to 50% having a cubic lattice have been studied. It is shown that closed pores are formed in the film if the porosity is less than 25%; in films with a larger porosity, percolation pores arise. It has been established that the rate of sintering depends on the annealing time nonmonotonically. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Transformations of porous layers upon high-temperature annealing: Simulation

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Publisher
Springer Journals
Copyright
Copyright © 2007 by Pleiades Publishing, Ltd.
Subject
Engineering; Electronic and Computer Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739707050022
Publisher site
See Article on Publisher Site

Abstract

In this work, the lattice kinetic Monte Carlo model has been used to investigate morphological transformations in porous films of different density in the process of high-temperature annealing. The characteristics of porous films of different initial densities have been compared at different time moments of the sintering process. Layers with a porosity from 20% to 50% having a cubic lattice have been studied. It is shown that closed pores are formed in the film if the porosity is less than 25%; in films with a larger porosity, percolation pores arise. It has been established that the rate of sintering depends on the annealing time nonmonotonically.

Journal

Russian MicroelectronicsSpringer Journals

Published: Sep 27, 2007

References

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