In this work, the lattice kinetic Monte Carlo model has been used to investigate morphological transformations in porous films of different density in the process of high-temperature annealing. The characteristics of porous films of different initial densities have been compared at different time moments of the sintering process. Layers with a porosity from 20% to 50% having a cubic lattice have been studied. It is shown that closed pores are formed in the film if the porosity is less than 25%; in films with a larger porosity, percolation pores arise. It has been established that the rate of sintering depends on the annealing time nonmonotonically.
Russian Microelectronics – Springer Journals
Published: Sep 27, 2007
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