Transformation of a Gaussian doping profile in a temperature field as influenced by the temperature dependence of the diffusion coefficient

Transformation of a Gaussian doping profile in a temperature field as influenced by the... An analytical solution is obtained for the dopant diffusion equation with a uniform temperature gradient and a Gaussian initial doping profile. It essentially takes into consideration the temperature dependence of the diffusion coefficient. With large temperature gradients, this factor is shown to lead to marked divergence of the tails of doping profiles corresponding to temperature gradients of opposite sign. The particular features of doping profiles as influenced by spatial temperature variation are explained. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Transformation of a Gaussian doping profile in a temperature field as influenced by the temperature dependence of the diffusion coefficient

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Publisher
Springer Journals
Copyright
Copyright © 2007 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739707030067
Publisher site
See Article on Publisher Site

Abstract

An analytical solution is obtained for the dopant diffusion equation with a uniform temperature gradient and a Gaussian initial doping profile. It essentially takes into consideration the temperature dependence of the diffusion coefficient. With large temperature gradients, this factor is shown to lead to marked divergence of the tails of doping profiles corresponding to temperature gradients of opposite sign. The particular features of doping profiles as influenced by spatial temperature variation are explained.

Journal

Russian MicroelectronicsSpringer Journals

Published: May 25, 2007

References

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