An analytical solution is obtained for the dopant diffusion equation with a uniform temperature gradient and a Gaussian initial doping profile. It essentially takes into consideration the temperature dependence of the diffusion coefficient. With large temperature gradients, this factor is shown to lead to marked divergence of the tails of doping profiles corresponding to temperature gradients of opposite sign. The particular features of doping profiles as influenced by spatial temperature variation are explained.
Russian Microelectronics – Springer Journals
Published: May 25, 2007
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.
All for just $49/month
Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly
Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.
All the latest content is available, no embargo periods.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud