An analytical solution is obtained for the dopant diffusion equation with a uniform temperature gradient and a Gaussian initial doping profile. It essentially takes into consideration the temperature dependence of the diffusion coefficient. With large temperature gradients, this factor is shown to lead to marked divergence of the tails of doping profiles corresponding to temperature gradients of opposite sign. The particular features of doping profiles as influenced by spatial temperature variation are explained.
Russian Microelectronics – Springer Journals
Published: May 25, 2007
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