Ti/TiO x single-electron devices produced with a step-edge-cut-off (SECO) method

Ti/TiO x single-electron devices produced with a step-edge-cut-off (SECO) method Single-electron current oscillations were for the first time observed in metal nanostructures produced by a step-edge-cut-off (SECO) method. The capacitance of an SECO-made Ti/TiOx tunnel junction was found to be as small as 10 aF at a linewidth of about 150 nm, which is nearly 50 times less than the capacitance obtained by shadow masking at the same linewidth. It is suggested that the produced lateral tunnel junctions are mesoscopic conductors with hopping conduction. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Ti/TiO x single-electron devices produced with a step-edge-cut-off (SECO) method

Loading next page...
 
/lp/springer_journal/ti-tio-x-single-electron-devices-produced-with-a-step-edge-cut-off-v59WSrfQz3
Publisher
Nauka/Interperiodica
Copyright
Copyright © 2000 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electronic and Computer Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1007/BF02773257
Publisher site
See Article on Publisher Site

Abstract

Single-electron current oscillations were for the first time observed in metal nanostructures produced by a step-edge-cut-off (SECO) method. The capacitance of an SECO-made Ti/TiOx tunnel junction was found to be as small as 10 aF at a linewidth of about 150 nm, which is nearly 50 times less than the capacitance obtained by shadow masking at the same linewidth. It is suggested that the produced lateral tunnel junctions are mesoscopic conductors with hopping conduction.

Journal

Russian MicroelectronicsSpringer Journals

Published: Dec 4, 2007

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve Freelancer

DeepDyve Pro

Price
FREE
$49/month

$360/year
Save searches from
Google Scholar,
PubMed
Create lists to
organize your research
Export lists, citations
Read DeepDyve articles
Abstract access only
Unlimited access to over
18 million full-text articles
Print
20 pages/month
PDF Discount
20% off