Single-electron current oscillations were for the first time observed in metal nanostructures produced by a step-edge-cut-off (SECO) method. The capacitance of an SECO-made Ti/TiOx tunnel junction was found to be as small as 10 aF at a linewidth of about 150 nm, which is nearly 50 times less than the capacitance obtained by shadow masking at the same linewidth. It is suggested that the produced lateral tunnel junctions are mesoscopic conductors with hopping conduction.
Russian Microelectronics – Springer Journals
Published: Dec 4, 2007
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