ISSN 1068-798X, Russian Engineering Research, 2017, Vol. 37, No. 7, pp. 647–650. © Allerton Press, Inc., 2017.
Original Russian Text © A.E. Gorodkova, A.A. Dyakonov, A.V. Herreinstein, 2017, published in STIN, 2017, No. 1, pp. 33–36.
Thermophysical Modeling of Microgrinding
A. E. Gorodkova*, A. A. Dyakonov**, and A. V. Herreinstein***
South Ural State University, Chelyabinsk, Russia
Abstract—Microgrinding is a promising machining method for high-precision microcomponents, but only
experimental models of the process exist as yet. Theoretical simulation of the process is required in order to
develop technology on the basis of microgrinding. In the present work, we develop a thermophysical model
of the process.
Keywords: micromachining, microelectromechanical systems, microgrinding, thermophysical model, tem-
Microcomponents are of great importance today:
accelerometers, gyroscopes, pressure sensors, micro-
phones, turbines, flow meters, etc. Parts ranging in
size from a few millimeters to microns are required in
rockets, cars, measuring instruments, medical instru-
ments, and elsewhere. An example of a microcompo-
nent is shown in Fig. 1: it measures about 1.5 × 1.5 mm;
the jaw thickness is tens of microns. The manufacture
of such high-precision components is hindered by
their complex structure, with numerous microscopic
channels, apertures, grooves, and slots.
Globally, microcomponents are produced by
means of nanolithography, erosional machining, laser
machining, and micromachines.
These methods are characterized by high equip-
ment costs, considerable machining time, and the
need for highly skilled workers. Another disadvantage
is that they may only be used for a limited range of
materials. For example, lithography is only used for
Micromachining may be used for a broader range
of materials. It ensures dimensional and positional
precision and high surface quality with maximum pro-
ductivity. The main forms of micromachining are
micromilling and microgrinding.
Microgrinding is used after micromilling, as a rule,
to eliminate the defects impermissible in high-preci-
sion components [1–3]. In Fig. 2, we show an exam-
ple of such defects (burring).
It is difficult to use microgrinding after micromill-
ing because the small size of the part significantly
complicates the resetting of the machine tool. In addi-
tion, scratches due to the grinding head appear on the
part, impairing its surface quality.
We now consider the possibility of using microgri-
nding as the only operation in producing high-preci-
sion components. By microgrinding, we may obtain a
qualitatively new product characterized by high preci-
sion and the absence of defects.
Fig. 1. Prototype forceps for eye surgery.
100.0U MSME15KV ×40 000
Fig. 2. Microscopic burring and cutting tracks in a micro-
channel obtained by micromilling.
200 µm200 µm200 µm