A thermodynamical model of the homogeneous and heterogeneous formation of clusters of catalysts is developed. Parameters of cluster formation during ferrocene pyrolysis were studied experimentally and theoretically. It was shown that the surface tension and size of clusters strongly depend on the temperature. The coefficient of surface tension and characteristic sizes of the clusters were calculated. The obtained dependences and parameters allow us to reconstruct the size distribution function of the clusters by setting the temperatures in the working zone and in the zone of ferrocene sublimation. This makes it possible to predict the cluster size, depending on the synthesis parameters, especially, the temperature.
Russian Microelectronics – Springer Journals
Published: Nov 17, 2012
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