Thermally Induced Viscous Flow of Borophosphosilicate-Glass Thin Films on Stepped Surfaces, Part 1: A Review of Quantitative Studies on Furnace and Rapid Thermal Annealing

Thermally Induced Viscous Flow of Borophosphosilicate-Glass Thin Films on Stepped Surfaces, Part... The results are reviewed of studies on the thermally induced viscous flow of borophosphosilicate-glass thin films, which are used as premetal dielectrics in ICs of micrometer or submicrometer feature size. Part 1 is concerned with experiments on the furnace annealing and rapid thermal annealing of the films. A quantitative approach to the description of thermal glass flow is discussed. Factors affecting the accuracy of the formulas are considered. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Thermally Induced Viscous Flow of Borophosphosilicate-Glass Thin Films on Stepped Surfaces, Part 1: A Review of Quantitative Studies on Furnace and Rapid Thermal Annealing

Loading next page...
 
/lp/springer_journal/thermally-induced-viscous-flow-of-borophosphosilicate-glass-thin-films-1ABxx9yEiR
Publisher
Kluwer Academic Publishers-Plenum Publishers
Copyright
Copyright © 2003 by MAIK Nauka/Interperiodica
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1023/A:1023916502417
Publisher site
See Article on Publisher Site

Abstract

The results are reviewed of studies on the thermally induced viscous flow of borophosphosilicate-glass thin films, which are used as premetal dielectrics in ICs of micrometer or submicrometer feature size. Part 1 is concerned with experiments on the furnace annealing and rapid thermal annealing of the films. A quantitative approach to the description of thermal glass flow is discussed. Factors affecting the accuracy of the formulas are considered.

Journal

Russian MicroelectronicsSpringer Journals

Published: Oct 11, 2004

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve Freelancer

DeepDyve Pro

Price
FREE
$49/month

$360/year
Save searches from
Google Scholar,
PubMed
Create lists to
organize your research
Export lists, citations
Read DeepDyve articles
Abstract access only
Unlimited access to over
18 million full-text articles
Print
20 pages/month
PDF Discount
20% off