A nonlinear effect of activation of InP thermal oxidation by lead, titanium, and zirconium oxides introduced during the process was discovered. The source of the activating admixtures was their solid solution. Under such conditions, mass transfer of metal cations towards the outer interface of the solid-phase source becomes the reaction-rate-limiting process. Oxide formation in an InP film is the governing process
Russian Microelectronics – Springer Journals
Published: Dec 4, 2007
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