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Thermal oxidation of indium phosphide in the presence of lead, zirconium, and titanium oxides

Thermal oxidation of indium phosphide in the presence of lead, zirconium, and titanium oxides A nonlinear effect of activation of InP thermal oxidation by lead, titanium, and zirconium oxides introduced during the process was discovered. The source of the activating admixtures was their solid solution. Under such conditions, mass transfer of metal cations towards the outer interface of the solid-phase source becomes the reaction-rate-limiting process. Oxide formation in an InP film is the governing process http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Thermal oxidation of indium phosphide in the presence of lead, zirconium, and titanium oxides

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References (12)

Publisher
Springer Journals
Copyright
Copyright © 2000 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electronic and Computer Engineering
ISSN
1063-7397
eISSN
1608-3415
DOI
10.1007/BF02773272
Publisher site
See Article on Publisher Site

Abstract

A nonlinear effect of activation of InP thermal oxidation by lead, titanium, and zirconium oxides introduced during the process was discovered. The source of the activating admixtures was their solid solution. Under such conditions, mass transfer of metal cations towards the outer interface of the solid-phase source becomes the reaction-rate-limiting process. Oxide formation in an InP film is the governing process

Journal

Russian Microelectronics – Springer Journals

Published: Dec 4, 2007

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