Thin epitaxial gadolinium manganite (GdMnO3) films were manufactured on single-crystal substrates of neodymium gallate (001) (NdGaO3) and strontium titanate (001) (SrTiO3) by the high-frequency magnetron sputtering method. The RBS analysis demonstrated that the thickness of the obtained films was ∼100 nm and the chemical composition corresponded to the stated stoichiometry. It was established by the X-ray diffraction analysis of the structure and phase composition of the obtained films that all films were single-phase but, depending on the temperature of the substrate during sputtering they have one or several types of orientations relative to the substrate. The X-ray diffraction analysis and high-resolution electron microscopy data on gadolinium manganite films on neodymium gallate substrates were verified. Features pointing to phase transitions in GdMnO3 that were earlier discovered on bulk single-crystal samples were found in the temperature dependence of the magnetic susceptibility.
Russian Microelectronics – Springer Journals
Published: Nov 17, 2012
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