An increasing number of pressure sensors are built in Si MEMS bridge structure using resistance devices. Recently, due to advance in autonomous driving and vehicles, numerous research in stability and sensitivity of pressure sensors have been conducted. In this research, metal diaphragm surface treatment characteristics, when MEMS devices are adhesived to the structure, to which pressure is transferred from the metal diaphragm, were studied. For surface structure shape, sand blasting process was used for the surface treatment. It is known that during the sand blasting process, adhesive strength increases with increases in penetration of the adhesive material and in surface roughness which results from an increase in powder sizes. However, based on the result obtained from this experiment, the uniformity of roughness determines adhesion, after a certain level of roughness is reached. Past a particular size of a SiC ceramic powder, adhesion shows decreasing trend because the thickness of adhesive materials decreases due to local variation in the surface. We could verify that in order to optimize the adhesion of the adhesive material from the sand blasting treatment, SiC ceramic powder sizes and treatment pressure need to be optimized.
Journal of Electroceramics – Springer Journals
Published: May 31, 2018
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.
All for just $49/month
Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly
Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.
Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.
Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.
All the latest content is available, no embargo periods.
“Hi guys, I cannot tell you how much I love this resource. Incredible. I really believe you've hit the nail on the head with this site in regards to solving the research-purchase issue.”Daniel C.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud
“I must say, @deepdyve is a fabulous solution to the independent researcher's problem of #access to #information.”@deepthiw
“My last article couldn't be possible without the platform @deepdyve that makes journal papers cheaper.”@JoseServera