The effect of electromagnetic fields and a current flowing across the films during the growth process on their crystalline structure and electrical, magnetic, and galvanomagnetic properties is investigated. Under the optimal parameters of the deposition process, polycrystalline, magnetic, and conducting films of permalloy at least 1.7 nm thick are obtained. Two critical thicknesses of the films are established, at which the scattering mechanisms of the conduction electrons vary.
Russian Microelectronics – Springer Journals
Published: May 17, 2009
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