Test object for calibrating the transmission electron microscope

Test object for calibrating the transmission electron microscope A new test object for calibrating the transmission electron microscope and scanning transmission microscope is suggested. The test was fabricated by means of cutting the silicon relief structure with the attested sizes of relief elements, which allowed us to use it both in the range of large magnifications (with the direct observation of the crystal lattice) and in the range of medium (near 30000) magnifications. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Test object for calibrating the transmission electron microscope

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Publisher
SP MAIK Nauka/Interperiodica
Copyright
Copyright © 2013 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739713030098
Publisher site
See Article on Publisher Site

Abstract

A new test object for calibrating the transmission electron microscope and scanning transmission microscope is suggested. The test was fabricated by means of cutting the silicon relief structure with the attested sizes of relief elements, which allowed us to use it both in the range of large magnifications (with the direct observation of the crystal lattice) and in the range of medium (near 30000) magnifications.

Journal

Russian MicroelectronicsSpringer Journals

Published: May 9, 2013

References

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