Sustaining Mechanisms of the ECR Heating of Electrons in Low-Pressure Microwave Plasmas under Magnetic Multipole Confinement

Sustaining Mechanisms of the ECR Heating of Electrons in Low-Pressure Microwave Plasmas under... A theoretical study is conducted on the sustaining of low-pressure electron-cyclotron-resonance (ECR) plasmas for which ionization is provided by high-energy electrons trapped by a multipolar permanent-magnet system. A particle simulation is carried out for the electron motion in magnetic systems of different configurations on assumptions suggested by previous experimental results. On this basis, the high-energy tail of the electron energy distribution function is examined. The escape of high-energy electrons (including that to the walls) is identified as the major factor behind the loss of electrons in the limit of a collisionless plasma. A comparative evaluation of different multipolar magnetic systems is made. Basic requirements are set out concerning the optimal design of ECR plasma reactors. New approaches to ECR electron heating are proposed. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Sustaining Mechanisms of the ECR Heating of Electrons in Low-Pressure Microwave Plasmas under Magnetic Multipole Confinement

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Publisher
Springer Journals
Copyright
Copyright © 2005 by MAIK "Nauka/Interperiodica"
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1007/s11180-005-0040-5
Publisher site
See Article on Publisher Site

Abstract

A theoretical study is conducted on the sustaining of low-pressure electron-cyclotron-resonance (ECR) plasmas for which ionization is provided by high-energy electrons trapped by a multipolar permanent-magnet system. A particle simulation is carried out for the electron motion in magnetic systems of different configurations on assumptions suggested by previous experimental results. On this basis, the high-energy tail of the electron energy distribution function is examined. The escape of high-energy electrons (including that to the walls) is identified as the major factor behind the loss of electrons in the limit of a collisionless plasma. A comparative evaluation of different multipolar magnetic systems is made. Basic requirements are set out concerning the optimal design of ECR plasma reactors. New approaches to ECR electron heating are proposed.

Journal

Russian Microelectronics – Springer Journals

Published: Sep 27, 2005

References

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