The surface of amorphous films with silicon-carbon matrix containing platinum nanoparticles is studied by the methods of scanning probe microscopy. The image obtained by atomic force microscopy shows that the film surface has a random roughness with an average size of less than 1 nm, while the image obtained by scanning tunneling microscopy presents hemispherical formations tightly arranged with a diameter of several tens of nanometers and a height of several nanometers. It is assumed that particles of platinum are ordered in the synthesis of the films.
Russian Microelectronics – Springer Journals
Published: Dec 9, 2011
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