Characteristics of a sensitive element based on the array of ZnO nanowires and Al2O3 metallized porous anodic oxide are studied. The element is shown to be sensitive to mechanical vibrations. The output signal of the device is found to have a linear dependence on acceleration. The dependence of the response on the frequency of mechanical vibrations is investigated.
Russian Microelectronics – Springer Journals
Published: Nov 14, 2014
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