Study of the vibration-sensitive piezoelectric element based on ZnO nanowires and porous electrode

Study of the vibration-sensitive piezoelectric element based on ZnO nanowires and porous electrode Characteristics of a sensitive element based on the array of ZnO nanowires and Al2O3 metallized porous anodic oxide are studied. The element is shown to be sensitive to mechanical vibrations. The output signal of the device is found to have a linear dependence on acceleration. The dependence of the response on the frequency of mechanical vibrations is investigated. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Study of the vibration-sensitive piezoelectric element based on ZnO nanowires and porous electrode

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Publisher
Pleiades Publishing
Copyright
Copyright © 2014 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739714070075
Publisher site
See Article on Publisher Site

Abstract

Characteristics of a sensitive element based on the array of ZnO nanowires and Al2O3 metallized porous anodic oxide are studied. The element is shown to be sensitive to mechanical vibrations. The output signal of the device is found to have a linear dependence on acceleration. The dependence of the response on the frequency of mechanical vibrations is investigated.

Journal

Russian MicroelectronicsSpringer Journals

Published: Nov 14, 2014

References

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