The spectral dependence of the absorption coefficient in the wavelength range from 190 nm to 1.9 μm of undoped silicon-carbon films synthesized from organosilicon liquid of polyphenylmethylsiloxane (PPMS) by high-frequency deposition from plasma of PPMS vapors is studied. The shortwave absorption region of the films is shown to be nonmonotonic: it contains electron transitions of different kinds, probably including interband ones.
Russian Microelectronics – Springer Journals
Published: Nov 17, 2012
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.
All for just $49/month
Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly
Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.
All the latest content is available, no embargo periods.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud