Stresses near the Edges of a Square Silicon Membrane

Stresses near the Edges of a Square Silicon Membrane The finite-element method (FEM) is used to calculate stresses in a square silicon pressure-sensing element. The stresses near the edges of the membrane are calculated and measured. Close agreement is achieved between the FEM predictions and experimental results. An empirical formula is constructed for the longitudinal component of stress at points outside the membrane. It is established that the normal component of stress should be considered when designing pressure sensors for use at applied pressures above 107 Pa. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Stresses near the Edges of a Square Silicon Membrane

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Publisher
Springer Journals
Copyright
Copyright © 2005 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1007/s11180-005-0035-2
Publisher site
See Article on Publisher Site

Abstract

The finite-element method (FEM) is used to calculate stresses in a square silicon pressure-sensing element. The stresses near the edges of the membrane are calculated and measured. Close agreement is achieved between the FEM predictions and experimental results. An empirical formula is constructed for the longitudinal component of stress at points outside the membrane. It is established that the normal component of stress should be considered when designing pressure sensors for use at applied pressures above 107 Pa.

Journal

Russian MicroelectronicsSpringer Journals

Published: Jul 15, 2005

References

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