Statistical Simulation for Process Design and Optimization in IC Manufacture

Statistical Simulation for Process Design and Optimization in IC Manufacture An approach to multidimensional statistical simulation for process design and optimization in IC manufacture is proposed. It essentially takes account of the sensitivity of circuit parameters to the random variability of process parameters. The approach is implemented in an algorithm and software for process statistical analysis and optimization. The response-surface methodology and pattern-recognition techniques are used for the approximation of relations between process and circuit parameters. The capabilities of the approach are evaluated from simulated and measured data on the fabrication of transistors by routine bipolar and CMOS technologies. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Statistical Simulation for Process Design and Optimization in IC Manufacture

Loading next page...
 
/lp/springer_journal/statistical-simulation-for-process-design-and-optimization-in-ic-XjC8GON80s
Publisher
Springer Journals
Copyright
Copyright © 2003 by MAIK Nauka/Interperiodica
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1023/A:1021861819656
Publisher site
See Article on Publisher Site

Abstract

An approach to multidimensional statistical simulation for process design and optimization in IC manufacture is proposed. It essentially takes account of the sensitivity of circuit parameters to the random variability of process parameters. The approach is implemented in an algorithm and software for process statistical analysis and optimization. The response-surface methodology and pattern-recognition techniques are used for the approximation of relations between process and circuit parameters. The capabilities of the approach are evaluated from simulated and measured data on the fabrication of transistors by routine bipolar and CMOS technologies.

Journal

Russian MicroelectronicsSpringer Journals

Published: Oct 11, 2004

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Search

Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly

Organize

Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.

Access

Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve

Freelancer

DeepDyve

Pro

Price

FREE

$49/month
$360/year

Save searches from
Google Scholar,
PubMed

Create lists to
organize your research

Export lists, citations

Read DeepDyve articles

Abstract access only

Unlimited access to over
18 million full-text articles

Print

20 pages / month

PDF Discount

20% off