Wavelength-tuning Fizeau interferometry has been widely used to measure and estimate the optical thickness of optical components. However, in multilayer interferometry, the coupling errors between the higher harmonics and phase-shift error cause systematic errors in the calculated phase distribution. This paper presents the derivation of a 15-sample phase-shifting algorithm that can compensate for the phase-shift miscalibration and up-to-first-order nonlinearity of the coupling errors between the second-order harmonic and phase-shift error. The characteristics of the 15-sample algorithm are estimated with respect to the Fourier representation in the frequency domain. The optical thickness of a highly reflective lithium niobate crystal wafer is measured using a wavelength-tuning Fizeau interferometer and 15-sample algorithm. Finally, the optical thickness is determined from the measured data using the statistical Student’s t test.
Optical Review – Springer Journals
Published: Sep 18, 2017
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