Statistical and interferometric determination of the optical thickness of a multilayer transparent plate

Statistical and interferometric determination of the optical thickness of a multilayer... Wavelength-tuning Fizeau interferometry has been widely used to measure and estimate the optical thickness of optical components. However, in multilayer interferometry, the coupling errors between the higher harmonics and phase-shift error cause systematic errors in the calculated phase distribution. This paper presents the derivation of a 15-sample phase-shifting algorithm that can compensate for the phase-shift miscalibration and up-to-first-order nonlinearity of the coupling errors between the second-order harmonic and phase-shift error. The characteristics of the 15-sample algorithm are estimated with respect to the Fourier representation in the frequency domain. The optical thickness of a highly reflective lithium niobate crystal wafer is measured using a wavelength-tuning Fizeau interferometer and 15-sample algorithm. Finally, the optical thickness is determined from the measured data using the statistical Student’s t test. Optical Review Springer Journals

Statistical and interferometric determination of the optical thickness of a multilayer transparent plate

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Springer Japan
Copyright © 2017 by The Optical Society of Japan
Physics; Optics, Lasers, Photonics, Optical Devices; Atomic, Molecular, Optical and Plasma Physics; Quantum Optics; Microwaves, RF and Optical Engineering
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