A tabular analytic method for calculating space surface parameters of different materials is suggested. It uses Fourier transforms obtained with an atomic force microscope. Examples of calculation are given for periodic space structures and surfaces with different degrees of anisotropy and periodicity. It is shown that space parameters, namely, texture direction and texture direction index and also radial wavelength and radial wavelength index, allow anisotropy characterization and periodicity determination at a nanometer scale.
Russian Microelectronics – Springer Journals
Published: Oct 8, 2004
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