Solid-Phase Reactions in the Thermal Oxidation of Ni/GaAs Heterostructures

Solid-Phase Reactions in the Thermal Oxidation of Ni/GaAs Heterostructures The thermal oxidation of GaAs covered with an Ni layer is studied experimentally. It is shown that this layer makes for better dielectric performance of the oxide film and inhibits the escape of the volatiles from GaAs. A possible pattern of the oxidation of Ni/GaAs heterostructures is put forward. It includes the formation of a transition layer between NiO and GaAs, which contains nickel–arsenic and nickel–gallium compounds. Reactions at the interface between the transition layer and NiO are considered. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Solid-Phase Reactions in the Thermal Oxidation of Ni/GaAs Heterostructures

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Publisher
Kluwer Academic Publishers-Plenum Publishers
Copyright
Copyright © 2002 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1023/A:1014385224423
Publisher site
See Article on Publisher Site

Abstract

The thermal oxidation of GaAs covered with an Ni layer is studied experimentally. It is shown that this layer makes for better dielectric performance of the oxide film and inhibits the escape of the volatiles from GaAs. A possible pattern of the oxidation of Ni/GaAs heterostructures is put forward. It includes the formation of a transition layer between NiO and GaAs, which contains nickel–arsenic and nickel–gallium compounds. Reactions at the interface between the transition layer and NiO are considered.

Journal

Russian Microelectronics – Springer Journals

Published: Oct 13, 2004

References

  • Accelerated Formation of an Oxide Dielectric Layer on GaAs in the Presence of V2O5 in Vapor Phase
    Mittova, I.; Sviridova, V.V.; Semenov, V.N.; Kuznetsova, T.N.
  • Dielectric-Layer Growth by the Thermal Oxidation of V2O5/GaAs Structures
    Mittova, I.; Sviridova, V.V.; Fetisova, S.V.; Semenov, V.N.; Nevryuev, I.I.
  • Solid-Phase Reactions in the Thermal Oxidation of Ni/InP Structures
    Mittova, I.; Prokin, A.N.; Gavryutin, V.N.; Sukhochev, A.S.; Kashkarov, V.M.
  • Thermal Oxidation of GaAs in the Presence of Lead Oxide in Vapor Phase
    Mittova, I.; Sviridova, V.V.; Semenov, V.N.
  • Dielectric-Layer Growth in the Thermal Processing of PbO/GaAs Structures in Argon and Oxygen
    Mittova, I.; Sviridova, V.V.; Kolyueva, I.A.
  • Infrared and Raman Spectra of Inorganic and Coordination Compounds
    Nakamoto, K.
  • Thin Films—Interdiffusion and Reactions

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