Simulation of the Bosch process for micro- and nanostructures

Simulation of the Bosch process for micro- and nanostructures This paper describes the capabilities of the Bosch process simulation for microand nanostructures with the aid of NEMO ETCHING software. The heart of this program is an original hybrid algorithm, which is based on the Monte–Carlo method and on the cell-graph approximation of the string model. It is shown that this algorithm considerably improves the performance of the model without loss of accuracy. The etching model is calibrated according to the real Bosch experiment process. The comparison between the simulation and experimental results shows this model is highly accurate. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Simulation of the Bosch process for micro- and nanostructures

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Publisher
Pleiades Publishing
Copyright
Copyright © 2015 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739715070124
Publisher site
See Article on Publisher Site

Abstract

This paper describes the capabilities of the Bosch process simulation for microand nanostructures with the aid of NEMO ETCHING software. The heart of this program is an original hybrid algorithm, which is based on the Monte–Carlo method and on the cell-graph approximation of the string model. It is shown that this algorithm considerably improves the performance of the model without loss of accuracy. The etching model is calibrated according to the real Bosch experiment process. The comparison between the simulation and experimental results shows this model is highly accurate.

Journal

Russian MicroelectronicsSpringer Journals

Published: Nov 14, 2015

References

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