Simulation of micromotor based on SOI structure

Simulation of micromotor based on SOI structure Problems of simulating an electrostatic micromotor based on the SOI structure with the use of application programs are discussed. Results of calculating the construction of the electrostatic micromotor over a wide frequency range are presented. It is shown that, when increasing the direct voltage applied to control electrodes, the useful capacity increases and the parasitic capacity decreases; at the same time, the front of the amplitude-frequency characteristic is transferred to the low-frequency region. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Simulation of micromotor based on SOI structure

Loading next page...
 
/lp/springer_journal/simulation-of-micromotor-based-on-soi-structure-CE1qTnW45H
Publisher
SP MAIK Nauka/Interperiodica
Copyright
Copyright © 2012 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739712070165
Publisher site
See Article on Publisher Site

Abstract

Problems of simulating an electrostatic micromotor based on the SOI structure with the use of application programs are discussed. Results of calculating the construction of the electrostatic micromotor over a wide frequency range are presented. It is shown that, when increasing the direct voltage applied to control electrodes, the useful capacity increases and the parasitic capacity decreases; at the same time, the front of the amplitude-frequency characteristic is transferred to the low-frequency region.

Journal

Russian MicroelectronicsSpringer Journals

Published: Nov 7, 2012

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve Freelancer

DeepDyve Pro

Price
FREE
$49/month

$360/year
Save searches from
Google Scholar,
PubMed
Create lists to
organize your research
Export lists, citations
Read DeepDyve articles
Abstract access only
Unlimited access to over
18 million full-text articles
Print
20 pages/month
PDF Discount
20% off