Simulation of micromotor based on SOI structure

Simulation of micromotor based on SOI structure Problems of simulating an electrostatic micromotor based on the SOI structure with the use of application programs are discussed. Results of calculating the construction of the electrostatic micromotor over a wide frequency range are presented. It is shown that, when increasing the direct voltage applied to control electrodes, the useful capacity increases and the parasitic capacity decreases; at the same time, the front of the amplitude-frequency characteristic is transferred to the low-frequency region. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Simulation of micromotor based on SOI structure

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Publisher
Springer Journals
Copyright
Copyright © 2012 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739712070165
Publisher site
See Article on Publisher Site

Abstract

Problems of simulating an electrostatic micromotor based on the SOI structure with the use of application programs are discussed. Results of calculating the construction of the electrostatic micromotor over a wide frequency range are presented. It is shown that, when increasing the direct voltage applied to control electrodes, the useful capacity increases and the parasitic capacity decreases; at the same time, the front of the amplitude-frequency characteristic is transferred to the low-frequency region.

Journal

Russian MicroelectronicsSpringer Journals

Published: Nov 7, 2012

References

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