ISSN 1063-7397, Russian Microelectronics, 2016, Vol. 45, No. 6, pp. 414–418. © Pleiades Publishing, Ltd., 2016.
Original Russian Text © V.V. Sirotkin, 2016, published in Mikroelektronika, 2016, Vol. 45, No. 6, pp. 452–455.
Simulation of Mass Transfer of Liquids through Microchannels
under the Influence of Surface Acoustic Waves
V. V. Sirotkin
Institute for Problems of Microelectronics and High-Purity Materials, Russian Academy of Sciences,
ul. Akademika Osipyana 6, Chernogolovka, 142432 Russia
Received March 11, 2016
Abstract—Parametric research of the mass transfer of liquids through flat microchannels under the influence
of surface acoustic waves was performed using numeric simulation.
Devices which use surface acoustic waves (SAWs)
for different manipulations with micro- and nano-vol-
umes of liquids are widely applied for the creation of a
“Lab-on-Chip” (for instance see ) and in numer-
ous other applications. For example the influence of
SAWs on liquids in microchannels causes their
directed motion. At the same time, such micropumps
are simple to produce and do not contain moving
parts. The successful development and optimization of
such devices require information about the influence
of the different characteristics of microchannels and
SAWs on the intensity and efficiency of the mass trans-
fer of liquids. One of the sources of this information is
computer-aided simulation whose results for the given
type of structures are widely presented in works such
as [2, 3]. Obviously each realization of a micropump
using the energy of SAWs requires separate analysis.
This work is devoted to the numeric research of liq-
uid flow peculiarities under the influence of SAWs in a
system consisting of two basins connected by a flat,
closed microchannel (Fig. 1). The system is located on
the surface of lithium niobate (LiNbO
) on which an
interdigitated structure for SAW generation is formed.
It is assumed that SAW impacts only liquids in a
channel. The channel has dimensions D
the same time, fulfillments of the correlation D
allows limiting by flow analysis only on axis 0XZ pass-
ing through the center of the channel. Axis x coincides
with the direction of SAW propagation.
Mass transfer in the system under consideration is
conditioned by the influence of acoustic streaming.
Switching the generating structure along the crystal
–liquid interface leads to the propagation of
an leaky wave of the Rayleigh type. This wave irradi-
ates energy into a liquid and forms an inhomogeneous
Fig. 1. Scheme of system being researched.
2 4 6 8 10 12 14 16
Liquid in channel