Simulation of implant distribution with the inverse Fokker-Planck equation

Simulation of implant distribution with the inverse Fokker-Planck equation A new mathematical model for the calculation of the implant distribution function in a solid is suggested. The case when low-transferred-energy ion collisions prevail is considered. The model exploits the reverse Fokker-Planck equation, which is derived from the Boltzmann transfer equation by approximating the collision integral with a differential operator. Algorithms for numerically solving the boundary-value problem for the Fokker-Planck equation are implemented. Obtained results are compared with the Monte-Carlo simulation of the implant concentration distribution for the case of high-energy boron implantation into silicon. Russian Microelectronics Springer Journals

Simulation of implant distribution with the inverse Fokker-Planck equation

Loading next page...
Copyright © 2000 by MAIK “Nauka/Interperiodica”
Engineering; Electronic and Computer Engineering
Publisher site
See Article on Publisher Site


You’re reading a free preview. Subscribe to read the entire article.

DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

Monthly Plan

  • Read unlimited articles
  • Personalized recommendations
  • No expiration
  • Print 20 pages per month
  • 20% off on PDF purchases
  • Organize your research
  • Get updates on your journals and topic searches


Start Free Trial

14-day Free Trial

Best Deal — 39% off

Annual Plan

  • All the features of the Professional Plan, but for 39% off!
  • Billed annually
  • No expiration
  • For the normal price of 10 articles elsewhere, you get one full year of unlimited access to articles.



billed annually
Start Free Trial

14-day Free Trial