Simulation of formation of nanostructures during sputtering of the surface by ion bombardment

Simulation of formation of nanostructures during sputtering of the surface by ion bombardment The results of the investigation of a spatially nonlocal model of surface erosion by the ion bombardment are presented. It is shown that the equilibrium states of the surface in the scope of the model are the plane and a terrace-like profile. Critical values of the bombardment angle and surface diffusion, at which the equilibrium states are lost to perturbations in the form of traveling waves, are determined. The obtained results allow us to explain the main form of the surface topography formed during ion sputtering of the surface, and to determine their parameters, the existence region, and the sequence of appearance. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Simulation of formation of nanostructures during sputtering of the surface by ion bombardment

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Publisher
SP MAIK Nauka/Interperiodica
Copyright
Copyright © 2011 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739711020089
Publisher site
See Article on Publisher Site

Abstract

The results of the investigation of a spatially nonlocal model of surface erosion by the ion bombardment are presented. It is shown that the equilibrium states of the surface in the scope of the model are the plane and a terrace-like profile. Critical values of the bombardment angle and surface diffusion, at which the equilibrium states are lost to perturbations in the form of traveling waves, are determined. The obtained results allow us to explain the main form of the surface topography formed during ion sputtering of the surface, and to determine their parameters, the existence region, and the sequence of appearance.

Journal

Russian MicroelectronicsSpringer Journals

Published: Mar 30, 2011

References

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