The output characteristics of a membrane-based heat-resistant calorimetric gas flow sensor are analyzed. The dependence of the output characteristics on the design parameters of the flow sensor is investigated. The change in heat distribution along the membrane depending on the flow rate is demonstrated and the effect of the distance between thermal resistors, as well as the thickness and material of the membrane, on the characteristics of the flow sensor is investigated. The simulation results are compared with the experimental data. The dependences found can be used for optimizing the design of flow sensors in order to increase their sensitivity and expand the dynamic range of a thermal mass flow meter.
Russian Microelectronics – Springer Journals
Published: Nov 14, 2015
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