The effect of synthesis conditions on the deposition of amorphous hydrogenated carbon (a-C:H) is estimated. Based on the expressions obtained in the simulation, the effect of partial hydrogen pressures and rf-radiation power on the deposition rate, composition, and structure of the a-C:H films is explained. The model of nucleation and growth of amorphous and crystalline diamondlike materials is developed [1, 2]. The model is expected to simplify the search for optimal regimes for synthesizing the materials with the specified composition, structure, and properties.
Russian Microelectronics – Springer Journals
Published: Jul 13, 2013
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