Simulating the deposition and synthesis of amorphous hydrogenated carbon films

Simulating the deposition and synthesis of amorphous hydrogenated carbon films The effect of synthesis conditions on the deposition of amorphous hydrogenated carbon (a-C:H) is estimated. Based on the expressions obtained in the simulation, the effect of partial hydrogen pressures and rf-radiation power on the deposition rate, composition, and structure of the a-C:H films is explained. The model of nucleation and growth of amorphous and crystalline diamondlike materials is developed [1, 2]. The model is expected to simplify the search for optimal regimes for synthesizing the materials with the specified composition, structure, and properties. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Simulating the deposition and synthesis of amorphous hydrogenated carbon films

Loading next page...
 
/lp/springer_journal/simulating-the-deposition-and-synthesis-of-amorphous-hydrogenated-2cCQFoLD6N
Publisher
Springer US
Copyright
Copyright © 2013 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739713040069
Publisher site
See Article on Publisher Site

Abstract

The effect of synthesis conditions on the deposition of amorphous hydrogenated carbon (a-C:H) is estimated. Based on the expressions obtained in the simulation, the effect of partial hydrogen pressures and rf-radiation power on the deposition rate, composition, and structure of the a-C:H films is explained. The model of nucleation and growth of amorphous and crystalline diamondlike materials is developed [1, 2]. The model is expected to simplify the search for optimal regimes for synthesizing the materials with the specified composition, structure, and properties.

Journal

Russian MicroelectronicsSpringer Journals

Published: Jul 13, 2013

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve Freelancer

DeepDyve Pro

Price
FREE
$49/month

$360/year
Save searches from Google Scholar, PubMed
Create lists to organize your research
Export lists, citations
Read DeepDyve articles
Abstract access only
Unlimited access to over
18 million full-text articles
Print
20 pages/month
PDF Discount
20% off