Silicon Surface Cleaning by Wet Etching for IC Production in a Closed Manufacturing System

Silicon Surface Cleaning by Wet Etching for IC Production in a Closed Manufacturing System Silicon wafer cleaning by wet etching in model equipment meeting requirements for a closed manufacturing system is considered. Theoretical grounds for the new production technology, including chemical treatment, rinsing in water, and drying in a single process, are discussed. It is shown that the cleaning efficiency is improved if a heated gas (such as nitrogen) passes through the etchant, causing the wafers to vibrate, rotate in the horizontal plane, or reciprocate in the vertical plane. Also, the heated gas exerts a cavitation effect on the wafer surface. The degree of surface contamination after chemical etching, rinsing, and drying is reported. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Silicon Surface Cleaning by Wet Etching for IC Production in a Closed Manufacturing System

Loading next page...
 
/lp/springer_journal/silicon-surface-cleaning-by-wet-etching-for-ic-production-in-a-closed-m1Vc0O0BEz
Publisher
Springer-Verlag
Copyright
Copyright © 2001 by MAIK “Nauka/Interperiodica”
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1023/A:1011318811003
Publisher site
See Article on Publisher Site

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

Monthly Plan

  • Read unlimited articles
  • Personalized recommendations
  • No expiration
  • Print 20 pages per month
  • 20% off on PDF purchases
  • Organize your research
  • Get updates on your journals and topic searches

$49/month

Start Free Trial

14-day Free Trial

Best Deal — 39% off

Annual Plan

  • All the features of the Professional Plan, but for 39% off!
  • Billed annually
  • No expiration
  • For the normal price of 10 articles elsewhere, you get one full year of unlimited access to articles.

$588

$360/year

billed annually
Start Free Trial

14-day Free Trial