Si/Si1 − x Gex Superlattice Structure from X-ray-Scattering Data

Si/Si1 − x Gex Superlattice Structure from X-ray-Scattering Data An x-ray structural characterization is carried out for MBE-grown Si/SixGe1 − x superlattices with nanometer layer thicknesses on Si(100) substrates. The characterization technique is a combination of x-ray reflectivity and x-ray diffraction in coplanar and noncoplanar arrangements. Detailed knowledge is gained of the superlattice structure, the crystalline quality of the layers, and the heterointerface morphology. Russian Microelectronics Springer Journals

Si/Si1 − x Gex Superlattice Structure from X-ray-Scattering Data

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Copyright © 2005 by MAIK “Nauka/Interperiodica”
Engineering; Electrical Engineering
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