Sensor based on silicon microchannel resistor

Sensor based on silicon microchannel resistor The work presented here is on manufacturing a sensing structure based on ordered microchannel silicon, for electrophysical detection of liquids. The behavior in time of various organic and inorganic matter (deionized water, ethanol, aqueous ethanol solutions, acetic acid, and ammonium hydroxide) applied to a porous body was studied by the method of measuring the conductivity of a microchannel membrane (a sensing element of a sensor). It was found that a microchannel resistor had a specific response for any liquid applied drop-wise to the sensing element. The proposed electrophysical method allowed us to identify the liquids with which the sensor interacted. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Russian Microelectronics Springer Journals

Sensor based on silicon microchannel resistor

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Publisher
Springer Journals
Copyright
Copyright © 2013 by Pleiades Publishing, Ltd.
Subject
Engineering; Electrical Engineering
ISSN
1063-7397
eISSN
1608-3415
D.O.I.
10.1134/S1063739713010046
Publisher site
See Article on Publisher Site

Abstract

The work presented here is on manufacturing a sensing structure based on ordered microchannel silicon, for electrophysical detection of liquids. The behavior in time of various organic and inorganic matter (deionized water, ethanol, aqueous ethanol solutions, acetic acid, and ammonium hydroxide) applied to a porous body was studied by the method of measuring the conductivity of a microchannel membrane (a sensing element of a sensor). It was found that a microchannel resistor had a specific response for any liquid applied drop-wise to the sensing element. The proposed electrophysical method allowed us to identify the liquids with which the sensor interacted.

Journal

Russian MicroelectronicsSpringer Journals

Published: Jan 4, 2013

References

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