A role of surface processes in the developing dynamics of electrochemical reactions between silicon and fluorine-containing electrolytes during the pore-formation in silicon matrix, which is required for the surface and volume nanostructuring technologies, is examined. The charge exchange processes between the media via the surface were shown to be responsible for the observed anodizing regimes: stable, oscillation, and chaotic. The proposed approach enables one to explain the anodizing regime as associated with synchronized variations of the pore shapes and the global oscillation processes in the silicon/electrolyte system. The data obtained may be applied to the engineering of three-dimensional electron systems.
Russian Microelectronics – Springer Journals
Published: Nov 12, 2014
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.
All for just $49/month
Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly
Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.
All the latest content is available, no embargo periods.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud